Author ORCID Identifier
Shahrzad Towfighian - https://orcid.org/0000-0002-5084-7395
electrostatic levitation, repulsive force, MEMS accelerometer, frequency response, mechanical sensitivity, MEMS sensor, pull-in instability, nonlinear dynamics
This paper describes a tunable MEMS electrostatic accelerometer that uses repulsive electrode conﬁguration so that the design is not hampered by capacitive pull-in instability. The repulsive force conﬁguration enables the increase of DC bias voltage without suﬀering from the pull-in failure mode. This ﬂexibility in increasing voltage can be employed as a tuning parameter to widen the working frequency range and to improve the robustness of the accelerometer. A lumped parameter model is developed to simulate the response of the microstructure under a combination of electrostatic and dynamic mechanical loading. The electrostatic force is estimated using a ﬁnite element simulation. The nonlinear equations of motion are solved for harmonic base excitations and halfsineshockloadsusingtheshootingandthelong-timeintegrationmethods,respectively. Tovalidatethemodel,asensorisfabricated and characterized under harmonic base excitation and mechanical shocks. A mechanical sensitivity of 0.1µm g is achieved when the bias voltage is 40(V). The experimental data are in good agreement with the simulation results. The comprehensive dynamical characterization presented in this study contributes to the development of functional accelerometers with tunable capabilities to harmonic and shock accelerations.
Sensors and Actuators A: Physical, published by Elsevier - https://doi.org/10.1016/j.sna.2019.02.007
Daeichin, Meysam; Ozdogan, Mehmet; Towfighian, Shahrzad; and Miles, Ronald, "Dynamic Response of a Tunable MEMS Accelerometer Based on Repulsive Force" (2019). Mechanical Engineering Faculty Scholarship. 23.
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