MEMS, Dynamics and Vibration, System Identification, Electrostatic Levitation
In this study, a two-step experimental procedure is described to determine the electrostatic levitation force in MEMS transducers. In these two steps, the microstructure is excited quasi-statically and dynamically and its response is used to derive the electrostatic force. The experimental results are obtained for a 1 by 1 plate that employs 112 levitation units. The experimentally obtained force is used in a lumped parameter model to find the microstructure response when it is subjected to different dynamical loads. The natural frequency and the damping ratios in the model are identified from the experimental results. The results show this procedure can be used as a method to extract the electrostatic force as a function of the microstructure’s degrees of freedom. The procedure can be easily used for any microstructure with a wide variety of electrode configurations to predict the response of the system to any input excitation.
The final version is published in the Journal of Vibration and Acoustics and can be found here: https://asmedigitalcollection.asme.org/vibrationacoustics/article/doi/10.1115/1.4046625/1080831/Experimental-characterization-of-the-electrostatic
Daeichin, Meysam; Miles, Ronald; and Towfighian, Shahrzad, "Experimental characterization of the electrostatic levitation force in MEMS transducers" (2020). Mechanical Engineering Faculty Scholarship. 29.