Title

Near-edge X-ray Refraction Fine Structure Microscopy

Document Type

Article

Publication Date

2017

Keywords

Spatial resolution, X-ray scattering, X-ray absorption near edge structure, Soft X-rays, X-ray microscopy

Abstract

We demonstrate a method for obtaining increased spatial resolution and specificity in nanoscale chemical composition maps through the use of full refractive reference spectra in soft x-ray spectro-microscopy. Using soft x-rayptychography, we measure both the absorption and refraction of x-rays through pristine reference materials as a function of photon energy and use these reference spectra as the basis for decomposing spatially resolved spectra from a heterogeneous sample, thereby quantifying the composition at high resolution. While conventional instruments are limited to absorption contrast, our novel refraction based method takes advantage of the strongly energy dependent scattering cross-section and can see nearly five-fold improved spatial resolutionon resonance.

Comments

Authors retain copyright; Publishers version/PDF may be used on author's personal website, arXiv, institutional website, institutional repository, funders designated repository or private forums on social academic network after 12 months embargo

Publisher Attribution

Published by the American Institute of Physics via doi: 10.1063/1.4975377

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