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electrostatic MEMS, out-of-plane actuator, optimization, boundary element approach, genetic algorithm


The design of repulsive electrostatic actuators having enlarged travel range is achieved by combining the boundary element approach and a genetic algorithm. The boundary element method enables calculating the electrostatic forces without time consuming finite element simulations. Once a static equation that uses a model of effective lumped mass solves the travel ranges, the GA maximizes travel ranges by optimizing the dimensional parameters. The effectiveness of the scheme is demonstrated with extensive experimental results showing the travel ranges of a micro out-of-plane actuator are increased by up to 190%. The developed platform can improve the signal-to-noise ratios and the performance of general multi-electrode systems.

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This paper appears in: IEEE Sensors Journal

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DOI to published version: 10.1109/JSEN.2022.3192486



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