Document Type
Article
Publication Date
7-2018
Keywords
MEMS, Parametric resonance, Repulsive-force, Electrostatic BeamsIn this paper, parametric excitation of a repulsive force electrostatic resonator is studied. A theoretical model is developed and validated by experimental data. A correspondence of the model to Mathieu's Equation is made to prove the existence and location of parametric resonance. The repulsive force creates a combined response that shows parametric and subharmonic resonance when driven at twice its natural frequency. The resonator can achieve large amplitudes of almost 24 μm and can remain dynamically stable while tapping on the electrode. Because the pull-in instability is eliminated, the beam bounces off after impact instead of sticking to the electrode. This creates larger, stable trajectories that would not be possible with traditional electrostatic actuation. A large dynamic range is attractive for MEMS resonators that require a large signal-to-noise ratio.
Abstract
In this paper, parametric excitation of a repulsive force electrostatic resonator is studied. A theoretical model is developed and validated by experimental data. A correspondence of the model to Mathieu's Equation is made to prove the existence and location of parametric resonance. The repulsive force creates a combined response that shows parametric and subharmonic resonance when driven at twice its natural frequency. The resonator can achieve large amplitudes of almost 24 μm and can remain dynamically stable while tapping on the electrode. Because the pull-in instability is eliminated, the beam bounces off after impact instead of sticking to the electrode. This creates larger, stable trajectories that would not be possible with traditional electrostatic actuation. A large dynamic range is attractive for MEMS resonators that require a large signal-to-noise ratio.
Recommended Citation
Pallay, Mark and Towfighian, Shahrzad, "A parametric electrostatic resonator using repulsive force" (2018). Mechanical Engineering Faculty Scholarship. 18.
https://orb.binghamton.edu/mechanical_fac/18
Comments
DOI: https://doi.org/10.1016/j.sna.2018.04.001