Document Type
Article
Publication Date
5-2023
Keywords
Tribo-electric-nano-generator (TENG), MEMS, accelerometer, self-powered, polyimide
Abstract
A self-powered triboelectric accelerometer miniaturized to the micro-scale is presented. This micro triboelectric accelerometer (MTEA) was fabricated using CMOS-compatible processes. The design followed the triboelectric nanogenerators made in meso-scale and operates in the contact-separation mode. The scaled-down, multilayer design enabled fabrication using microelectromechanical systems (MEMS) technology. The MTEA was made using an aluminum and polyimide triboelectric pair that generated charges on the contact. A square movable plate that is 2 mm x 2 mm was fabricated with 1 μm thickness. Then, the fabricated MTEA was excited by a mini-shaker at known frequencies (0.1–7 kHz) and accelerations (1–10 g), and the output was recorded. The output was 0.7 V at the resonance frequency (700 Hz). The generated voltage has a linear relationship with the acceleration with a maximum sensitivity of 70 mV/g at the 700 Hz excitation frequency.
Publisher Attribution
The final version of this article is published in Nano Energy.
Recommended Citation
Alzgool, Mohammad; Tian, Yu; Davaji, Benyamin; and Towfighian, Shahrzad, "Self-powered Triboelectric MEMS Accelerometer" (2023). Mechanical Engineering Faculty Scholarship. 44.
https://orb.binghamton.edu/mechanical_fac/44
Creative Commons License
This work is licensed under a Creative Commons Attribution-NonCommercial-No Derivative Works 4.0 International License.