Document Type
Article
Publication Date
8-7-2025
Keywords
Triboelectric nanogenerator (TENG), MEMS, accelerometer, optimization, sensitivity, resonator
Abstract
A genetic algorithm is used to optimize the sensitivity of a triboelectric MEMS accelerometer fabricated using CMOS-compatible processes. The optimization focuses on the structural parameters of an awl-shaped serpentine microspring (ASSM) connected to the proof mass. Constraints are defined by microfabrication standards and the available chip area. Three different constraint problems are considered, and the algo- rithm yields designs with maximized sensitivity in each case. Simulations under various sinusoidal vibration scenarios show that the optimized designs significantly outperform the previous version, achieving a 2.72× improvement at 1000 Hz and up to 20× at 500 Hz.
Publisher Attribution
Copyright © 2025 by ASME
Recommended Citation
Tian, Yu; Davaji, Benyamin; and Towfighian, Shahrzad, "Genetic Algorithm Optimization to Maximize Sensitivity of Triboelectric MEMS Accelerometers" (2025). Mechanical Engineering Faculty Scholarship. 52.
https://orb.binghamton.edu/mechanical_fac/52
Creative Commons License
This work is licensed under a Creative Commons Attribution 4.0 International License.
Comments
This is the accepted version of the article published in the Journal of Vibration and Acoustics.
Paper No: VIB-25-1128 https://doi.org/10.1115/1.4069338