Document Type
Article
Publication Date
10-2025
Keywords
MEMS, Electrostatic Actuator, Electrostatic Levitation, Repulsive Force, Internal Resonance, Nonlinear Dynamics, T-shaped Beam
Abstract
This study explores the internal resonance of a T-shaped beam subjected to electrostatic forces at the MEMS scale. The actuator's unique configuration includes a side substrate, a fixed bottom substrate, and a suspended beam, enabling out-of-plane movement when excited. The T-shaped beam is designed to have a commensurate ratio of 1:2 between the fifth and sixth modes. The mathematical model of the system is developed and the shooting method is used to solve the reduced order model. Theoretical and experimental results reveal the interaction of two modes. The results indicate that due to the exchange of energy between the two modes and the quadratic nonlinearity, when the system is excited at the fifth mode, it responds at the sixth mode's resonant frequency. The proposed internal resonator can improve sensitivity in various applications with the great advantages of simplicity and ease of fabrication.
Publisher Attribution
This is the accepted manuscript published in Journal of Micromechanics and Microengineering. DOI 10.1088/1361-6439/ae174d
© 2025 The Author(s). Published by IOP Publishing Ltd
Recommended Citation
Eskandari, Ali; Alzgool, Mohammad; Tian, Yu; Younis, Mohammad I.; and Towfighian, Shahrzad, "Internal resonance of a T-shaped electrostatic levitation actuator" (2025). Mechanical Engineering Faculty Scholarship. 54.
https://orb.binghamton.edu/mechanical_fac/54
Creative Commons License
This work is licensed under a Creative Commons Attribution 4.0 International License.
